Patent holdings for IPC class H01J 37/143

Total number of patents in this class: 32

10-year publication summary

1
2
3
1
3
3
1
4
3
1
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
6816
7
Hermes Microvision Incorporated B.V.
129
4
Hitachi High-Technologies Corporation
2034
3
KLA Corporation
1223
3
IMS Nanofabrication GmbH
56
2
Param Corporation
8
2
Nikon Corporation
7162
1
Thermo Electron Scientific Instruments LLC
169
1
Advantest Corporation
1939
1
Board of Trustees of Michigan State University
1141
1
FEI Company
851
1
Huazhong University of Science and Technology
930
1
KLA-Tencor Corporation
2574
1
Nfab Limited
5
1
Topcon Corporation
979
1
Carl Zeiss MultiSEM GmbH
85
1
Hitachi High-Tech Corporation
4424
1
Other owners 0